aims193 (Carl Zeiss)
90
Structured Review
Carl Zeiss
aims193
Aims193, supplied by Carl Zeiss, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/aims193/aims193/us12326656-241-41-44
Average 90 stars, based on 1 article reviews
Aims193, supplied by Carl Zeiss, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/aims193/aims193/us12326656-241-41-44
Average 90 stars, based on 1 article reviews
aims193 - by Bioz Stars,
2026-09
90/100 stars
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other:Article Title: Mask blank, method of manufacturing imprint mold, method of manufacturing transfer mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device Article Snippet: Furthermore, by using AIMS193 (manufactured by Article Title: Mask blank and method of manufacturing photomask Article Snippet: Moreover, regarding the phase shift mask 200 of Example 1, a simulation of a transfer image was made when an exposure transfer was made on a resist film on a semiconductor device at an exposure light of 193 nm Article Title: Mask blank, method of manufacturing imprint mold, method of manufacturing transfer mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device Article Snippet: Furthermore, by using AIMS193 (manufactured by Article Title: Mask blank, method for manufacturing reflective mask, and method for manufacturing semiconductor device Article Snippet: Furthermore, by using AIMS193 (manufactured by Article Title: Mask blank and method of manufacturing photomask Article Snippet: Further, on the phase shift mask of Comparative Example 1, a simulation of a transfer image was made when an exposure transfer was made on a resist film on a semiconductor device at an exposure light of wavelength 193 nm using Article Title: Mask blank and method of manufacturing photomask Article Snippet: Further, on the phase shift mask of Comparative Example 2, a simulation of a transfer image was made when an exposure transfer was made on a resist film on a semiconductor device at an exposure light of wavelength 193 nm using Article Title: Mask blank, method of manufacturing imprint mold, method of manufacturing transfer mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device Article Snippet: Furthermore, by using AIMS193 (manufactured by Article Title: Mask blank, method of manufacturing imprint mold, method of manufacturing transfer mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device Article Snippet: Furthermore, by using AIMS193 (manufactured by |